Kinetic Theory of Gases

The commonality between MBE and CVD is that they are both based on gas-phase conditions; it should come as no surprise that we are going to need the section on Gas Laws from our previous module on Scaling Laws. In particular we have seen these principal results:

;
; ;

The first of these is simply the ideal gas law expressed per molecule rather than per mole, the second is a number of equivalent expressions for the average speed of gaseous particles, the third is an expression for the number rate of collisions/unit area immersed in a gas, the fourth is an equation for the mean free path between molecules and the last is an expression for the rate of binary collisions/volume of gas. These results are all useful in evaluating conditions that exist in the gas phase as part of understanding required conditions for both MBE and CVD systems.